China, Japan, Netherlands.

Among the companies that can manufacture machines, the Netherlands (ASML) is the most technologically advanced. The price is also the most expensive. The technical threshold of lithography machines is extremely high and can be called the product of human wisdom.

At present, in the global high-end lithography machine market below 45 nanometers, the Dutch ASML market share has reached more than 80%, and ASML is currently the only provider of lithography machines in the world that can achieve 7 nanometer precision, so ASML It is no exaggeration to say that he is the real super overlord of the global chip industry.

Main performance indicators

The main performance indicators of the lithography machine are: supported substrate size range, resolution, alignment accuracy, exposure method, light source wavelength, light intensity uniformity , production efficiency, etc.

Resolution is a way of describing the finest line accuracy that can be achieved by photolithography processing. The resolution of photolithography is limited by the diffraction of the light source, so it is limited by the light source, photolithography system, photoresist and process.

Alignment accuracy is the positioning accuracy of inter-layer patterns during multi-layer exposure.

Exposure methods are divided into contact proximity, projection and direct writing.

The wavelength of the exposure light source is divided into ultraviolet, deep ultraviolet and extreme ultraviolet regions. The light sources include mercury lamps, excimer lasers, etc.