The rotary vane vacuum pump (referred to as the rotary vane pump) is an oil-sealed mechanical vacuum pump. Its working pressure range is 101325~1.33×10-2 (Pa) and it is a low vacuum pump. It can be used alone or as a backing pump for other high vacuum pumps or ultra-high vacuum pumps. It has been widely used in production and scientific research departments such as metallurgy, machinery, military industry, electronics, chemical industry, light industry, petroleum and medicine. The rotary vane pump can extract dry gas from a sealed container. If it is equipped with a gas ballast device, it can also extract a certain amount of condensable gas. But it is not suitable for extracting gases that contain too much oxygen, are corrosive to metals, have chemical reactions with pump oil, and contain particulate dust. The rotary vane pump is one of the most basic vacuum obtaining equipment in vacuum technology. Rotary vane pumps are mostly small and medium-sized pumps. Rotary vane pumps are available in single-stage and double-stage types. The so-called double-stage pump means that two single-stage pumps are connected in series structurally. Generally, it is made into two stages to obtain a higher degree of vacuum. The relationship between the pumping speed of the rotary vane pump and the inlet pressure is stipulated as follows: when the inlet pressure is 1333Pa, 1.33Pa and 1.33×10-1 (Pa), the pumping speed value shall not be less than 95% of the nominal pumping speed of the pump, respectively. 50% and 20%. Rotary vane pump is mainly composed of pump body, rotor, rotary vane, end cover, spring, etc. A rotor is installed eccentrically in the cavity of the rotary vane pump. The outer circle of the rotor is tangent to the inner surface of the pump cavity (there is a small gap between the two). Two rotary vanes with springs are installed in the rotor slot. When rotating, the centrifugal force and the tension of the spring keep the top of the rotary vane in contact with the inner wall of the pump cavity. The rotation of the rotor drives the rotary vane to slide along the inner wall of the pump cavity. The two rotary vanes divide the crescent-shaped space surrounded by the rotor, pump chamber and two end covers into three parts A, B and C. When the rotor rotates in the direction of the arrow, the volume of space A connected with the suction port is It is gradually increasing and is in the process of inhalation. The volume of the space C connected to the exhaust port is gradually shrinking and is in the process of exhausting. The volume of space B in the center is also gradually decreasing and is in the process of compression. Since the volume of space A gradually increases (i.e. expands), the gas pressure decreases. The external gas pressure at the inlet of the pump is greater than the pressure in space A, so the gas is sucked in. When space A is isolated from the suction port, that is, it turns to the position of space B, the gas begins to be compressed, the volume gradually shrinks, and finally communicates with the exhaust port. When the compressed gas exceeds the exhaust pressure, the exhaust valve is pushed open by the compressed gas, and the gas passes through the oil layer in the tank and is discharged to the atmosphere. The purpose of continuous air pumping is achieved by the continuous operation of the pump. If the discharged gas passes through the air channel and is transferred to another stage (low vacuum stage), it is pumped away by the low vacuum stage, and then compressed by the low vacuum stage and then discharged to the atmosphere, forming a two-stage pump. At this time, the total compression ratio is borne by two stages, thus increasing the ultimate vacuum degree.

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